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European Tender Two Parallel Plate Plasma-enhanced Chemical Vapor Deposition (PECVD) Systems
Publicatie-ID: 374806
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The University of Twente is tendering to purchase two new Plasma-Enhanced Chemical Vapor Deposition systems. The MESA+ Institute will invest in two new systems for deposition of (doped) dielectric thin films to upgrade and reinforce their state-of-the-art thin film technology and processing capacity.