Gesloten
Openbaar
XUV Piezo Cluster
Publicatie-ID: 356791
Details
Opdrachtgever
Universiteit TwentePublicatiedatum
10 november 2024
Deadline
13 januari 2025
CPV-codes
38000000-5
Omschrijving
The XUV Optics Group in MESA+ Institute at University of Twente tends to invest in the XUV Piezo Cluster to carry research on piezoelectric film-based sensors and actuators. The aim is to scale up the piezoelectric film coating capabilities to larger substrate dimensions with more advanced process control systems that enable to explore a broader process window.