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European Tender Dry Etcher
Publicatie-ID: 352093
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Opdrachtgever
Universiteit TwentePublicatiedatum
6 oktober 2024
Omschrijving
The MESA+ Institute will invest in a new Dry Etch tool system to reinforce their state-of-the-art etch capabilities and etch capacity. Applications: The tool must be capable of etching silicon and/or silicon-based materials for a variety of nano- and/or microscale structures with nanometre precision and high wafer-scale uniformity.